Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12195848 | Method of cleaning, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kazuhiro Harada, Shingo NOHARA, Yasunobu Koshi, Masayoshi Minami | 2025-01-14 |