Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12288683 | Method of manufacturing semiconductor device, substrate processing method, non-transitory computer-readable recording medium and substrate processing apparatus | Yasunobu Koshi, Yoshitomo HASHIMOTO, Katsuyoshi Harada | 2025-04-29 |
| 12266522 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Syuzo SAKURAI, Yasuhiro Inokuchi, Masayoshi Minami | 2025-04-01 |