Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400855 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kiyohisa ISHIBASHI | 2025-08-26 |
| 12351908 | Substrate processing method, recording medium, and substrate processing apparatus | Kazuhiro Harada | 2025-07-08 |