Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400855 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takeo Hanashima | 2025-08-26 |
| 12249503 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Tsukasa Kamakura | 2025-03-11 |