Issued Patents 2025
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424410 | RF pulsing within pulsing for semiconductor RF plasma processing | Maolin Long, Yuhou Wang, Alex Paterson | 2025-09-23 |
| 12300463 | Method and system for automated frequency tuning of radiofrequency (RF) signal generator for multi-level RF power pulsing | Mathew Evans, Alexander Paterson | 2025-05-13 |
| 12283461 | Systems and methods for achieving peak ion energy enhancement with a low angular spread | Juline Shoeb, Alex Paterson | 2025-04-22 |
| 12283463 | Systems and methods for multi-level pulsing in RF plasma tools | Maolin Long, John Drewery, Vikram Singh | 2025-04-22 |
| 12217940 | Sensor data compression in a plasma tool | John C. Valcore, Jr., Travis Joseph Wong, Sandeep Mudunuri, Bostjan Pust | 2025-02-04 |