Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12397435 | Substrate location detection and adjustment | Michael J. Martin, Yuhou Wang | 2025-08-26 |
| 12322579 | Metal contamination reduction in substrate processing systems with transformer coupled plasma | Maolin Long, Neema Rastgar | 2025-06-03 |
| 12300463 | Method and system for automated frequency tuning of radiofrequency (RF) signal generator for multi-level RF power pulsing | Mathew Evans, Ying Wu | 2025-05-13 |
| 12261029 | Protection system for switches in direct drive circuits of substrate processing systems | Maolin Long, Yuhou Wang, Michael J. Martin | 2025-03-25 |