Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322579 | Metal contamination reduction in substrate processing systems with transformer coupled plasma | Maolin Long, Alexander Paterson | 2025-06-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322579 | Metal contamination reduction in substrate processing systems with transformer coupled plasma | Maolin Long, Alexander Paterson | 2025-06-03 |