Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424410 | RF pulsing within pulsing for semiconductor RF plasma processing | Maolin Long, Yuhou Wang, Ying Wu | 2025-09-23 |
| 12283461 | Systems and methods for achieving peak ion energy enhancement with a low angular spread | Juline Shoeb, Ying Wu | 2025-04-22 |
| 12193138 | Matchless plasma source for semiconductor wafer fabrication | Maolin Long, Yuhou Wang, Ricky Marsh | 2025-01-07 |