Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406872 | Semiconductor processing chamber with dual-lift mechanism for edge ring elevation management | James E. Tappan | 2025-09-02 |
| 12368057 | Enhanced closed loop gas based heat exchange | Neil Benjamin | 2025-07-22 |
| 12283463 | Systems and methods for multi-level pulsing in RF plasma tools | Ying Wu, Maolin Long, Vikram Singh | 2025-04-22 |
| 12191122 | Electrostatic chuck with spatially tunable RF coupling to a wafer | — | 2025-01-07 |