Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12368057 | Enhanced closed loop gas based heat exchange | John Drewery | 2025-07-22 |
| 12283462 | Control of plasma formation by RF coupling structures | Hema Swaroop Mopidevi, Lee Chen, Thomas W. Anderson, Shaun Smith | 2025-04-22 |
| 12237155 | Magnetic shielding for plasma sources | Hema Swaroop Mopidevi, John Pease, Thomas W. Anderson | 2025-02-25 |
| 12198896 | Compact high density plasma source | Roger Patrick, Lee Chen, Alan M. Schoepp, Clint Thomas, Thomas W. Anderson +1 more | 2025-01-14 |