Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12283462 | Control of plasma formation by RF coupling structures | Hema Swaroop Mopidevi, Lee Chen, Shaun Smith, Neil Benjamin | 2025-04-22 |
| 12237155 | Magnetic shielding for plasma sources | Hema Swaroop Mopidevi, Neil Benjamin, John Pease | 2025-02-25 |
| 12198896 | Compact high density plasma source | Roger Patrick, Neil Benjamin, Lee Chen, Alan M. Schoepp, Clint Thomas +1 more | 2025-01-14 |