Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12283462 | Control of plasma formation by RF coupling structures | Lee Chen, Thomas W. Anderson, Shaun Smith, Neil Benjamin | 2025-04-22 |
| 12237155 | Magnetic shielding for plasma sources | Neil Benjamin, John Pease, Thomas W. Anderson | 2025-02-25 |