Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12383923 | Atomic layer deposition with plasma source | Vaino Kilpi, Wei Li, Juhana Kostamo, Sven Lindfors | 2025-08-12 |
| 12325915 | Substrate processing apparatus and method | Timo Vähä-Ojala, Vaino Kilpi, Niklas HOLM | 2025-06-10 |
| 12297535 | Substrate processing methods and apparatus | Juhana Kostamo, Marko PUDAS | 2025-05-13 |