Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12403560 | Determining substrate precession with acoustic signals | Nicholas A. Wiswell, Benjamin Cherian, Jun Qian | 2025-09-02 |
| 12343840 | Control of processing parameters for substrate polishing with substrate precession | Eric Lau, Charles C. Garretson, Huanbo Zhang, Zhize Zhu, Benjamin Cherian +1 more | 2025-07-01 |
| 12257665 | Machine vision as input to a CMP process control algorithm | Benjamin Cherian, Jun Qian, Nicholas A. Wiswell, Dominic J. Benvegnu, Boguslaw A. Swedek | 2025-03-25 |