Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12371776 | Overlap susceptor and preheat ring | Zhepeng CONG, Schubert S. Chu, Nyi O. Myo, Kartik Shah, Zhiyuan Ye | 2025-07-29 |
| 12334318 | Plasma preclean system for cluster tool | Songjae Lee, Masato Ishii, Martin TRUEMPER, Martin Jeffrey Salinas, Yong ZHENG +5 more | 2025-06-17 |
| 12324061 | Epitaxial deposition chamber | Shu-Kwan LAU, Brian H. Burrows, Zhiyuan Ye, Enle CHOO, Danny D. WANG +5 more | 2025-06-03 |
| 12188148 | Multi-layer EPI chamber body | Shu-Kwan LAU, Zhiyuan Ye, Brian H. Burrows | 2025-01-07 |