Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12403560 | Determining substrate precession with acoustic signals | Benjamin Cherian, Jun Qian, Thomas H. Osterheld | 2025-09-02 |
| 12257665 | Machine vision as input to a CMP process control algorithm | Benjamin Cherian, Jun Qian, Dominic J. Benvegnu, Boguslaw A. Swedek, Thomas H. Osterheld | 2025-03-25 |
| 12233505 | Polishing system with capacitive shear sensor | Chih Chung Chou, Dominic J. Benvegnu | 2025-02-25 |