Issued Patents 2025
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12405226 | Substrate inspection apparatus and substrate inspection method | Jangwoon Sung, Lei Tian, Hao Wang, Jiabei Zhu, Wookrae Kim +3 more | 2025-09-02 |
| 12347096 | Semiconductor measurement apparatus | Jinseob Kim, Wookrae Kim, Jinyong Kim, Jaehwang Jung, Sungho Jang | 2025-07-01 |
| 12307650 | Scanning electron microscope device, semiconductor manufacturing device, and method of controlling semiconductor manufacturing device | Yunje Cho, Subong SHON, Taehyoung Lee, Yeny YIM | 2025-05-20 |
| 12228499 | Pupil ellipsometry measurement apparatus and method and method of fabricating semiconductor device using the pupil ellipsometry measurement method | Jaehwang Jung, Yasuhiro Hidaka, Mitsunori Numata, Wookrae Kim, Jinseob Kim | 2025-02-18 |
| 12222282 | Semiconductor measurement apparatus | Seoyeon Jeong, Seungwoo Lee, Inho Andy Shin, Wookrae Kim, Jaehwang Jung | 2025-02-11 |