Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431341 | Apparatus for arcing diagnosis, plasma process equipment including the same, and arcing diagnosis method | Changsoon Lim, Youngdo Kim, Daewon Kang, Chansoo Kang, Kyunghyun Kim +3 more | 2025-09-30 |
| 12422245 | Semiconductor measurement apparatus | Garam Choi, Wookrae Kim, Jinseob Kim, Jinyong Kim, Younguk JIN +1 more | 2025-09-23 |
| 12347096 | Semiconductor measurement apparatus | Myungjun Lee, Jinseob Kim, Wookrae Kim, Jinyong Kim, Jaehwang Jung | 2025-07-01 |
| 12313393 | Level sensor and substrate processing apparatus including the same | Sangwoo Bae, Minhwan Seo, Jangwoon Sung, Akinori Okubo, Seungwoo Lee +3 more | 2025-05-27 |