Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12405226 | Substrate inspection apparatus and substrate inspection method | Lei Tian, Hao Wang, Jiabei Zhu, Myungjun Lee, Wookrae Kim +3 more | 2025-09-02 |
| 12313393 | Level sensor and substrate processing apparatus including the same | Sungho Jang, Sangwoo Bae, Minhwan Seo, Akinori Okubo, Seungwoo Lee +3 more | 2025-05-27 |