Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12228499 | Pupil ellipsometry measurement apparatus and method and method of fabricating semiconductor device using the pupil ellipsometry measurement method | Jaehwang Jung, Yasuhiro Hidaka, Wookrae Kim, Jinseob Kim, Myungjun Lee | 2025-02-18 |