Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431361 | Self-aligned double patterning with spatial atomic layer deposition | Ning Li, Victor Nguyen, Mihaela Balseanu, Keiichi Tanaka, Steven Marcus | 2025-09-30 |
| 12410523 | Integrated low k recovery and ALD metal deposition process for advanced technology node | Shinjae Kwon, Xinyi Lu, Fredrick J. Kim, Bo Xie, Chi-I Lang +1 more | 2025-09-09 |
| 12362169 | Methods and apparatus for low temperature silicon nitride films | Wenbo Yan, Cong Trinh, Ning Li, Mihaela Balseanu, Maribel Maldonado-Garcia | 2025-07-15 |