Issued Patents 2025
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12417890 | Methods, systems, and apparatus for monitoring radiation output of lamps | Zhepeng CONG, Khokan Chandra Paul, Tao SHENG | 2025-09-16 |
| 12354855 | Process kits and related methods for processing chambers to facilitate deposition process adjustability | Zhepeng CONG, Ala Moradian, Tao SHENG, Nimrod SMITH, Vinh N. TRAN | 2025-07-08 |
| 12270752 | EPI self-heating sensor tube as in-situ growth rate sensor | Zhepeng CONG, Tao SHENG | 2025-04-08 |
| 12243761 | Detection and analysis of substrate support and pre-heat ring in a process chamber via imaging | Martin Jeffrey Salinas, Zhepeng CONG, Hui Chen, Xinning LUAN | 2025-03-04 |
| 12221696 | Process kits and related methods for processing chambers to facilitate deposition process adjustability | Zhepeng CONG, Ala Moradian, Tao SHENG, Nimrod SMITH, Vinh N. TRAN | 2025-02-11 |