Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406874 | Substrate holding apparatus, substrate processing apparatus having substrate holding apparatus, and substrate processing method | Manao Hoshina | 2025-09-02 |
| 12377516 | Polishing head and polishing apparatus | — | 2025-08-05 |
| 12237194 | Substrate transporter and substrate processing apparatus including substrate transporter | Akihiro Yazawa, Takashi Koba, Kenichi Kobayashi, Kenichi Akazawa, Fong-Jie Du +5 more | 2025-02-25 |