Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12403507 | Transfer apparatus, cleaning module, and substrate processing apparatus | Asagi Matsugu, Manato Furusawa, Hideharu Aoyama, Ayumu Saito, Yusuke Sasaya +4 more | 2025-09-02 |
| 12237194 | Substrate transporter and substrate processing apparatus including substrate transporter | Takashi Koba, Kenichi Kobayashi, Kenichi Akazawa, Fong-Jie Du, Makoto Kashiwagi +5 more | 2025-02-25 |