Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12337438 | Break-in processing apparatus and break-in processing method | Osamu Nabeya | 2025-06-24 |
| 12237194 | Substrate transporter and substrate processing apparatus including substrate transporter | Akihiro Yazawa, Takashi Koba, Kenichi Kobayashi, Fong-Jie Du, Makoto Kashiwagi +5 more | 2025-02-25 |