Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12381089 | Information processing system, information processing method, program, and substrate processing apparatus | Keisuke Namiki, Makoto Fukushima | 2025-08-05 |
| 12358096 | Rubber membrane having first and second hardness for use in a polishing head | Shingo Togashi | 2025-07-15 |
| 12337438 | Break-in processing apparatus and break-in processing method | Kenichi Akazawa | 2025-06-24 |
| 12230529 | Substrate holding apparatus, substrate suction determination method, substrate polishing apparatus, substrate polishing method, method of removing liquid from upper surface of wafer to be polished, elastic film for pressing wafer against polishing pad, substrate release method, and constant amount gas supply apparatus | Satoru Yamaki, Makoto Fukushima | 2025-02-18 |