Issued Patents 2025
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12403507 | Transfer apparatus, cleaning module, and substrate processing apparatus | Asagi Matsugu, Akihiro Yazawa, Manato Furusawa, Hideharu Aoyama, Ayumu Saito +4 more | 2025-09-02 |
| 12372866 | Imprint apparatus and product manufacturing method | Tatsuya Arakawa | 2025-07-29 |
| 12237194 | Substrate transporter and substrate processing apparatus including substrate transporter | Akihiro Yazawa, Takashi Koba, Kenichi Akazawa, Fong-Jie Du, Makoto Kashiwagi +5 more | 2025-02-25 |
| 12218351 | Positive electrode active material for nonaqueous electrolyte secondary battery | Atsushi Ogawa, Soshi KAWAMURA, Toru Sukigara, Hiroto MAEYAMA | 2025-02-04 |
| 12204244 | Imprint apparatus and article manufacturing method | Tatsuya Arakawa | 2025-01-21 |