Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406874 | Substrate holding apparatus, substrate processing apparatus having substrate holding apparatus, and substrate processing method | Makoto Kashiwagi | 2025-09-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406874 | Substrate holding apparatus, substrate processing apparatus having substrate holding apparatus, and substrate processing method | Makoto Kashiwagi | 2025-09-02 |