Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12429795 | Detection apparatus, lithography apparatus, and article manufacturing method | Ryo Nakayama, Takahiro Matsumoto, Hironobu Fujishima, Yuichi Fujita | 2025-09-30 |
| 12326668 | Detection apparatus, lithography apparatus, and article manufacturing method | Ryo Nakayama, Yasuyuki Unno, Takahiro Matsumoto, Tooru Kawashima | 2025-06-10 |