Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12429795 | Detection apparatus, lithography apparatus, and article manufacturing method | Ryo Nakayama, Takahiro Matsumoto, Takafumi Miyaharu, Hironobu Fujishima | 2025-09-30 |
| 12360059 | Foreign matter inspection apparatus, foreign matter inspection method, processing apparatus, and article manufacturing method | Shinichiro Hirai | 2025-07-15 |
| 12277204 | Authentication system and authentication method | Sotaro Moriwaki, Shigenobu Nishida, Ayumi Kokubun, Koji Tanaka | 2025-04-15 |