Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12429795 | Detection apparatus, lithography apparatus, and article manufacturing method | Ryo Nakayama, Takahiro Matsumoto, Takafumi Miyaharu, Yuichi Fujita | 2025-09-30 |
| 12405538 | Calibration method, detection system, exposure apparatus, article manufacturing method, and non-transitory computer-readable storage medium | Wataru Yamaguchi | 2025-09-02 |