Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12429795 | Detection apparatus, lithography apparatus, and article manufacturing method | Takahiro Matsumoto, Takafumi Miyaharu, Hironobu Fujishima, Yuichi Fujita | 2025-09-30 |
| 12326668 | Detection apparatus, lithography apparatus, and article manufacturing method | Yasuyuki Unno, Takahiro Matsumoto, Takafumi Miyaharu, Tooru Kawashima | 2025-06-10 |
| 12282720 | Fluid state estimation system, learning device, learning program, estimation device, and estimation program | Kazuya FURUICHI, Motoki IRIKURA, Junichiro KAJI, Tatsuro Hori, Nobuhiro KAKUTA | 2025-04-22 |