Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12326668 | Detection apparatus, lithography apparatus, and article manufacturing method | Ryo Nakayama, Yasuyuki Unno, Takahiro Matsumoto, Takafumi Miyaharu | 2025-06-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12326668 | Detection apparatus, lithography apparatus, and article manufacturing method | Ryo Nakayama, Yasuyuki Unno, Takahiro Matsumoto, Takafumi Miyaharu | 2025-06-10 |