Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12398460 | Substrate processing apparatus, furnace opening assembly, substrate processing method, method of manufacturing semiconductor device and non-transitory tangible medium | Tatsuya NISHINO, Akira HORII, Tomoshi Taniyama | 2025-08-26 |
| 12368043 | Substrate processing apparatus, processing method, and non-transitory computer-readable recording medium | Hideto Tateno, Sadayoshi Horii | 2025-07-22 |
| 12269052 | Substrate liquid processing apparatus and liquid discharge evaluation method | Terufumi Wakiyama, Yuichi Douki, Minoru Tashiro, Reo Kitayama, Shu Yamamoto | 2025-04-08 |