Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12276455 | Substrate processing apparatus and substrate processing method | Masataka Gosho, Tomohito Ura, Satoshi Okamura | 2025-04-15 |
| 12269052 | Substrate liquid processing apparatus and liquid discharge evaluation method | Terufumi Wakiyama, Yuichi Douki, Akinori Tanaka, Minoru Tashiro, Reo Kitayama | 2025-04-08 |