Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12276455 | Substrate processing apparatus and substrate processing method | Masataka Gosho, Shu Yamamoto, Tomohito Ura | 2025-04-15 |
| 12237177 | Substrate processing apparatus and substrate processing method | Shogo Fukui, Masataka Gosho, Tomohito Ura | 2025-02-25 |