Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12276455 | Substrate processing apparatus and substrate processing method | Shu Yamamoto, Tomohito Ura, Satoshi Okamura | 2025-04-15 |
| 12237177 | Substrate processing apparatus and substrate processing method | Shogo Fukui, Satoshi Okamura, Tomohito Ura | 2025-02-25 |
| 12237178 | Substrate processing apparatus and substrate processing method | Reijiro Yamanaka | 2025-02-25 |