Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12398460 | Substrate processing apparatus, furnace opening assembly, substrate processing method, method of manufacturing semiconductor device and non-transitory tangible medium | Tatsuya NISHINO, Akinori Tanaka, Tomoshi Taniyama | 2025-08-26 |
| 12203169 | Substrate processing apparatus, method of processing substrate, method of manufacturing semiconductor device and recording medium | — | 2025-01-21 |