Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12368043 | Substrate processing apparatus, processing method, and non-transitory computer-readable recording medium | Akinori Tanaka, Hideto Tateno | 2025-07-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12368043 | Substrate processing apparatus, processing method, and non-transitory computer-readable recording medium | Akinori Tanaka, Hideto Tateno | 2025-07-22 |