Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12368043 | Substrate processing apparatus, processing method, and non-transitory computer-readable recording medium | Akinori Tanaka, Sadayoshi Horii | 2025-07-22 |
| 12334401 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Satoshi Takano | 2025-06-17 |
| D1070797 | Furnace for substrate processing apparatus | Takatomo Yamaguchi, Daiki Kimoto | 2025-04-15 |