Issued Patents 2025
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424408 | Apparatus of plural charged-particle beams | Shuai Li, Xuedong Liu, Juying Dou, Xuerang Hu, Zhongwei Chen | 2025-09-23 |
| 12354833 | Multiple landing energy scanning electron microscopy systems and methods | Wei Fang, Zhong-Wei Chen | 2025-07-08 |
| 12347643 | Multiple charged-particle beam apparatus and methods of operating the same using movable lenses | Xuedong Liu, Xuerang Hu, Zhong-Wei Chen | 2025-07-01 |
| 12278081 | System and method for alignment of secondary beams in multi-beam inspection apparatus | Qingpo Xi, Xuerang Hu, Xuedong Liu, Zhong-Wei Chen | 2025-04-15 |
| 12243709 | Apparatus using multiple charged particle beams | Xuedong Liu, Xuerang Hu, Zhong-Wei Chen | 2025-03-04 |
| 12237143 | Apparatus of plural charged-particle beams | Xuedong Liu, Xuerang Hu, Zhongwei Chen | 2025-02-25 |
| 12237144 | Apparatus using multiple beams of charged particles | Xuerang Hu, Xuedong Liu, Zhong-Wei Chen | 2025-02-25 |
| 12211669 | Multiple charged-particle beam apparatus with low crosstalk | Zizhou GONG, Xuerang Hu, Xuedong Liu, Zhong-Wei Chen | 2025-01-28 |
| 12196692 | Systems and methods for voltage contrast defect detection | Xuedong Liu, Zhong-Wei Chen, Xiaoyu JI, Xiaoxue CHEN, Weimin Zhou +1 more | 2025-01-14 |
| 12191109 | Sample pre-charging methods and apparatuses for charged particle beam inspection | Xuedong Liu, Qingpo Xi, Youfei Jiang, Xuerang Hu, Zhongwei Chen | 2025-01-07 |