Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12374524 | In-lens wafer PE-charging and inspection with multiple beams | Weihua Yin | 2025-07-29 |
| 12283453 | Creating multiple electron beams with a photocathode film | Xinrong Jiang, Michael Steigerwald, Ralph Nyffenegger | 2025-04-22 |
| 12191109 | Sample pre-charging methods and apparatuses for charged particle beam inspection | Xuedong Liu, Qingpo Xi, Weiming Ren, Xuerang Hu, Zhongwei Chen | 2025-01-07 |