Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12278081 | System and method for alignment of secondary beams in multi-beam inspection apparatus | Xuerang Hu, Xuedong Liu, Weiming Ren, Zhong-Wei Chen | 2025-04-15 |
| 12191109 | Sample pre-charging methods and apparatuses for charged particle beam inspection | Xuedong Liu, Youfei Jiang, Weiming Ren, Xuerang Hu, Zhongwei Chen | 2025-01-07 |