Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12379669 | Massive overlay metrology sampling with multiple measurement columns | Jonathan M. Madsen, Andrei V. Shchegrov, Amnon Manassen, Andrew V. Hill, Yossi Simon +1 more | 2025-08-05 |
| 12370581 | In-situ process chamber chuck cleaning by cleaning substrate | Mor Azaria, Giampietro Bieli, Shai Mark, Adi Pahima | 2025-07-29 |
| 12327741 | Oscillating secondary stage for frame-mode overlay metrology | Izhar Agam, Andrew V. Hill, Amnon Manassen, Daria Negri | 2025-06-10 |