Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12370581 | In-situ process chamber chuck cleaning by cleaning substrate | Mor Azaria, Giampietro Bieli, Adi Pahima, Yoram Uziel | 2025-07-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12370581 | In-situ process chamber chuck cleaning by cleaning substrate | Mor Azaria, Giampietro Bieli, Adi Pahima, Yoram Uziel | 2025-07-29 |