Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347679 | System and method for radical and thermal processing of substrates | Xinming Zhang, Shashank Sharma, Norman L. Tam, Matthew Spuller | 2025-07-01 |
| 12327763 | Treatment methods for titanium nitride films | Xinming Zhang, Shashank Sharma, Norman L. Tam, Matthew Spuller | 2025-06-10 |
| 12261047 | Doping techniques | Wolfgang Aderhold, Yi-Chiau Huang, Wei Liu, Benjamin Colombeau | 2025-03-25 |