Issued Patents 2025
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12390843 | Rapid thermal processing (RTP) chamber outgassing removal | — | 2025-08-19 |
| 12379253 | Emissivity independence tuning | — | 2025-08-05 |
| 12366481 | Reflector plate for substrate processing | — | 2025-07-22 |
| 12278101 | Coded substrate material identifier communication tool | Boris Axelrod, Maxim D. SHAPOSHNIKOV, Dayal Ramachandran, Bindusagar Marath Sankarathodi | 2025-04-15 |
| 12278127 | Auto fine-tuner for desired temperature profile | Yi-Cheng Wang | 2025-04-15 |
| 12261047 | Doping techniques | Yi-Chiau Huang, Wei Liu, Benjamin Colombeau, Abhilash J. Mayur | 2025-03-25 |