Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347679 | System and method for radical and thermal processing of substrates | Xinming Zhang, Abhilash J. Mayur, Shashank Sharma, Matthew Spuller | 2025-07-01 |
| 12327763 | Treatment methods for titanium nitride films | Xinming Zhang, Shashank Sharma, Abhilash J. Mayur, Matthew Spuller | 2025-06-10 |