Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347679 | System and method for radical and thermal processing of substrates | Abhilash J. Mayur, Shashank Sharma, Norman L. Tam, Matthew Spuller | 2025-07-01 |
| 12327763 | Treatment methods for titanium nitride films | Shashank Sharma, Abhilash J. Mayur, Norman L. Tam, Matthew Spuller | 2025-06-10 |