Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12171054 | EUV light source with a beam positioning device | Martin Lambert, Boris Regaard, Tolga Ergin | 2024-12-17 |
| 11968767 | EUV light source with a separation device | Stefan Piehler | 2024-04-23 |